Synchronization in Pairs of Opto-Thermally Driven Mechanically Coupled Micro-Oscillators

We study the phenomenon of synchronization in pairs doubly clamped, mechanically coupled silicon micro-oscillators. A continuous-wave laser beam is used to drive micro-beams into limit cycle oscillations and detect using interferometry. Devices different dimensions are introduce frequency detuning, short bridges connecting as mechanical coupling between oscillators. The region plotted for MEMS system detuning vs. parameter space compared with numerical analysis a corresponding, lumped-parameter model. Three states observed i.e. drift state, quasi-periodic synchronized state. model also distinguishes in-phase out-of-phase where at low strengths detuning. [2022-0140]